Pull-in Dynamics of an Elastic Beam Actuated by Continuously Distributed Electrostatic Force
作者： Slava Krylov , Ronen Maimon
DOI: 10.1115/1.1760559
关键词:
摘要: A detailed study of the transient nonlinear dynamics an electrically actuated micron scale beam is presented. model developed using Galerkin procedure with normal modes as a basis accounts for distributed electrostatic forces, squeezed film damping, and rotational inertia mass carried by beam. Special attention paid to near instability points. Results generated confirmed experimentally show that damping leads shrinkage spatial region where stable motion realizable. The voltage causes dynamic instability, in turn, approaches static pull-in value.
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