作者: Wallace S.H. Wong , C.H. Lai
DOI: 10.1016/J.SNA.2013.02.011
关键词:
摘要: Abstract Dual pulse actuation voltage waveforms that are capable of mitigating micro-electromechanical system (MEMS) switch bouncing presented. The displacement and velocity the MEMS membrane actuated using these then simulated compared. To eliminate bouncing, should ideally be zero just before contact is made. Otherwise large momentum from high impact will bounce back, extending switching time bringing about wear tear to surfaces. effect parameter variations on studied for switches with different gap widths. variation in waveform also investigated this paper. exponentially saturating dual-pulse has shown great robustness against both variations. exhibited fastest a wider range parameters Practical experiments were carried out TeraVicta TT712-68CSP corroborate findings.