On the investigation of a reliable actuation control method for ohmic RF MEMS switches
作者： Michalis Spasos , Rajagopal Nilavalan
DOI: 10.1016/J.MEJO.2011.08.005
关键词:
摘要: Efficient control of RF MEMS switches is a very important issue as it correlated to main failure mechanisms/modes such the impact force and bouncing phenomena, which degrade their dynamic performance longevity. This paper presents specific ohmic under three different actuation modes, tailored pulse optimization method based on Taguchi's technique (voltage mode control), resistive damping (charge control) finally Hybrid mode, combination pulse, technique. Coventorware simulations indicate that optimized Tailored velocity reduced by around 90%, initial 75% maximum displacement during release phase 95%, while switching speed increased 20% compared with step mode. The inappropriate for this type switch only partial improvement pull-down has been achieved. Finally, comparison between modes shows excels better characteristics most importantly offers immunity manufacturing operation tolerances.
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