Voltage and pull-in time in current drive of electrostatic actuators
作者： J. Pons-Nin , A. Rodriguez , L.M. Castaner
DOI: 10.1109/JMEMS.2002.1007398
关键词:
摘要: The absolute maximum value of the voltage developed across an electrostatic actuator when driven by a current source has been calculated as well minimum for pull-in time. These two results are drive using /spl delta/-pulse and numerical assessment is given to show that nonzero parasitic capacitance, realistic shape pulse, or finite damping coefficient do not increase beyond limit time always larger than analytical minimum. A scaled-up macromodel used register transients validate theoretical predictions.
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