Energy-Based Approach to Adaptive Pulse Shaping for Control of RF-MEMS DC-Contact Switches
作者： Cuong Do , Maryna Lishchynska , Marcin Cychowski , Kieran Delaney , Martin Hill
DOI: 10.1109/JMEMS.2012.2208217
关键词:
摘要: This paper presents a closed-form analysis to design pre-shaped open-loop driving actuation waveform reduce the bouncing effect while maintaining fast switching of microelectromechanical system contact switch. A single-degree-of-freedom model and principle energy conservation were utilized shaped voltage close switch with low impact speed. The method can easily adapt variance pull-in voltages due imperfect manufacturing observed drift during operation. analytical calculation pulse closure time near zero velocity agree simulation are validated experimentally on set cantilever switches. It is shown that also applicable for electrostatically actuated devices more general geometries.
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