Input-shaping control of nonlinear MEMS

摘要: We develop a new technique for preshaping input commands to control microelectromechanical systems (MEMS). In general, MEMS are excited using an electrostatic field which is nonlinear function of the states and voltage. Due nonlinearity, frequency device response step depends on magnitude. Therefore, traditional shaping techniques based linear theory fail provide good performance over whole range. The we propose combines equations describing static device, energy balance argument, approximate analytical solution preshape voltage commands. As example, consider set-point stabilization electrostatically actuated torsional micromirror. shaped applied drive micromirror desired tilt angle with zero residual vibrations. Simulations show that fast mirror switching operation almost overshoot can be realized this technique. proposed methodology accounts significant higher modes used shape other micro- macro-systems.