Control of MEMS-Based Scanning-Probe Data-Storage Devices

摘要: Micro-electro-mechanical-system (MEMS)-based scanning-probe data-storage devices are emerging as potential ultra-high-density, low-access-time, and low-power alternative to conventional data storage. Nanoscale accuracy short latency in the navigation of probes primary control challenges probe-storage applications. This paper focuses on design address these a probe-based storage prototype using micro-scanner nanopositioner for medium. Experimental results demonstrate remarkably seek times order 1 ms worst-case operations. Moreover, thermal-sensor-based approach is compared with two-sensor-control configuration employing both global-position information from thermal sensors medium-derived position information. Drift low-frequency noise can affect performance scheme over long periods operation. addressed by second scheme, novel architecture based Hinfin framework that uses best measurement each frequency regions.