A servomechanism for a micro-electro-mechanical-system-based scanning-probe data storage device

摘要: Micro-electro-mechanical-system (MEMS)-based scanning-probe data storage devices are emerging as potential ultra-high-density, low-access-time, and low-power alternatives to conventional storage. One implementation of probe-based uses thermomechanical means store retrieve information in thin polymer films. the challenges building such is extreme accuracy short latency required navigation probes over medium. This paper focuses on design characterization a servomechanism achieve accurate positioning prototype. In our device, medium positioned MEMS scanner with x/y-motion capabilities about 100 µm. The device also includes thermal position sensors that provide x/y-position servo controller. Based discrete state-space model dynamics, controller designed using linear quadratic Gaussian approach state estimation. random seek performance this evaluated compared proportional, integrator, derivative (PID) approach. results demonstrate superiority approach, which achieves times 4 ms ± 50 µm range. Finally, experimental show closed-loop track following position-sensor signals feasible yields position-error standard deviation approximately 2 nm.