Fabrication of Fe Nanodot Using AAO Prepatterned by Laser Interference Lithography

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DOI: 10.4283/JKMS.2007.17.3.137

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摘要: The ordering of nanopores in AAO has been improved by using laser interference lithography. After growing Fe and Cu on this substrate vacuum removing AAO, nanodots are fabricated. ordered one dimension following the prepatterning. It confirmed from magnetic hysteresis loop that have vortex structure dipolar interaction is dominant among them.

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