High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation
作者： Geng Wang , Guoqiang Chen , Fuzhong Bai
DOI: 10.1007/S00542-015-2638-9
关键词:
摘要: A novel composite control strategy is developed in this paper to compensate hysteresis, resonance and disturbances a piezo-actuated nanopositioner. The objective of the piezoelectric positioner achieve high tracking performance terms accuracy speed. For purpose, Bouc---Wen model based hysteresis compensator first applied mitigate nonlinearity without complex inverse calculation. And then, linear dynamic compensated system identified inverted account for resonance. model-based inversion feed-forward controller designed speed tracking. Afterwards, high-gain feedback on notch filter handle modeling inaccuracy all kinds disturbances. So, can be augmented realize precision enhancement demonstrated through several comparative experiments. 70 Hz bandwidth 0.281 μm achieved, which validated effectiveness proposed scheme.
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