Computer controlled micropositioning stage for 3D MEMS fabrication
作者： Vahdat Homayoun , Reza Askari Moghadam , Javad Koohsorkhi
DOI: 10.1109/IRANIANCEE.2017.7985498
关键词:
摘要: Micro Electro Mechanical Systems (MEMS) are widely used in different industries like automobile and cell phone industries. There several processes for MEMS fabrication. The most famous method is silicon fabrication technology which based on Integrated Circuits (IC) process. In this paper a micropositioning stage presented can be fabricating three dimensional micro structures. It moves X-Y directions with resolutions better than 5 microns limited range consists of two step motors, ball screws, interface board computer. Interface transfers the signal between motors computer using an ARM processor peripheral hardware. Computer main runs controlling algorithm. Obviously, it replaced by simple microprocessor when control finalized. primary experimental results show 15 micrometer resolution, while maximum movement length more 100 millimeters. Ethernet connection transferring data It's possible to remote via LAN connection.
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