A transparent polymeric flexure-hinge nanopositioner, actuated by a piezoelectric stack actuator.

摘要: Nanopositioning using piezoelectric actuation and a flexure mechanism is one of most common methods for nanometre-scale positioning. Generally, nanopositioners have been made from metal. Thus, their application to various environments needs careful consideration with regard corrosion circumference interference. In this study, we propose the concept chip-like polymeric flexure-based nanopositioner equipped actuation. its design, motion performance was predicted finite element analysis deformation stress, injection mouldability considered through an moulding simulation allow fabrication by moulding. A cyclic olefin copolymer fabricated mesoscale process. Experiments demonstrated that developed had travel range 15 µm high linearity it could be successfully controlled proportional–integral–derivative (PID) algorithm including low-pass filter root mean square control error 3 nm.