作者: A. Pantazi , A. Sebastian , H. Pozidis , E. Eleftheriou
DOI: 10.3182/20080706-5-KR-1001.01561
关键词:
摘要: Abstract Probe-based data-storage devices are being considered as ultra-high-density, small-form-factor and low-power alternatives to conventional data storage. Ultra-high storage densities of up 1 Tb/in2 or more can be achieved by using atomic force microscopy (AFM) techniques write, read back, erase in very thin polymer films. High rates parallel operation large arrays with thousands micro/nanomechanical cantilevers. MEMS-based x/y micro-scanners used navigate the AFM probes over medium. The ultra-high that probe-storage realize pose a significant challenge control design for positioning navigation. This paper focuses on track-follow micro-scanner high-density probe-based device. requirements described, controllers designed tracking performance well sensor fusion presented. Experimental results information recorded at high back without errors validate performance.