Tilted Beam Piezoresistive Displacement Sensor: Design, Modeling, and Characterization
作者： Mohammad Maroufi , Ali Bazaei , Ali Mohammadi , S. O. Reza Moheimani
DOI: 10.1109/JMEMS.2015.2426180
关键词:
摘要: We present a comprehensive study of the design, modeling, and characterization an on-chip piezoresistive displacement sensor. The design is based on bulk piezoresistivity tilted clamped-guided beams without need for additional steps to generate doped regions. sensor implemented in one-degree-of-freedom microelectromechanical system (MEMS) nanopositioner, where also function as suspension system. A standard MEMS fabrication process used realize device single-crystalline silicon structural material. are oppositely develop tensile compressive axial forces during stage movement, creating differential sensing feature. An analytical approach proposed modeling beams. linearity configuration investigated analytically. static, dynamic, noise characteristics presented, followed by model-based investigation measured dynamic feedthrough. [2015-0030]
bath.ac.uk
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