Characterization of piezoresistive and electrothermal sensors in MEMS devices

Mohamamd Maroufi , S.O. Reza Moheimani
ieee sensors 1 -3

5
2016
Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner

Michael G. Ruppert , Mohammad Maroufi , Ali Bazaei , S.O. Reza Moheimani
IFAC-PapersOnLine 50 ( 1) 15554 -15560

2
2017
Tracking Control of Constant-Linear-Velocity Spiral Reference by LQG Method

Ali Bazaei , Mohammad Maroufi , S.O. Reza Moheimani
IFAC-PapersOnLine 50 ( 1) 15568 -15573

2
2017
Compressibility Behaviour of Warp Knitted Spacer Fabrics Based on Elastic Curved Bar Theory

Fatemeh Mokhtari , Mahnaz Shamshirsaz , Masoud Latifi , Mohammad Maroufi
Journal of Engineered Fibers and Fabrics 6 ( 4) 155892501100600

16
2011
Iterative Learning Control for High-Speed Rosette Trajectory Tracking

Nastaran Nikooienejad , Mohammad Maroufi , S. O. Reza Moheimani
2019 IEEE 58th Conference on Decision and Control (CDC) 6832 -6837

2019
Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy

Anthony G. Fowler , Mohammad Maroufi , S. O. Reza Moheimani
Review of Scientific Instruments 86 ( 4) 046107

6
2015
A Closed-loop MEMS force sensor with adjustable stiffness

Mohammad Maroufi , Hamed Alemansour , S.O. Reza Moheimani
2017 IEEE Conference on Control Technology and Applications (CCTA) 438 -443

7
2017
Tracking of constant-linear-velocity spiral trajectories by approximate internal model control

Ali Bazaei , Mohammad Maroufi , S.O. Reza Moheimani
2017 IEEE Conference on Control Technology and Applications (CCTA) 129 -134

4
2017
An SOI-MEMS Piezoelectric Torsional Stage With Bulk Piezoresistive Sensors

Mohammad Maroufi , S. O. Reza Moheimani
IEEE Sensors Journal 17 ( 10) 3030 -3040

8
2017
Iterative Learning Control for Video-rate Atomic Force Microscopy

Nastaran Nikooienejad , Mohammad Maroufi , Reza Moheimani
IEEE-ASME Transactions on Mechatronics 1 -1

1
2020
Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei , Mohammad Maroufi , Ali Mohammadi , S. O. Reza Moheimani
international conference on advanced intelligent mechatronics 1469 -1473

2014
Sequential Cycloid Scanning for Time-resolved Atomic Force Microscopy

Nastaran Nikooienejad , Afshin Alipour , Mohammad Maroufi , S. O. Reza Moheimani
international conference on advanced intelligent mechatronics 125 -130

1
2018
A Feedback Controlled MEMS Probe Scanner for On-chip AFM

Hamed Alemansour , Mohammad Maroufi , Afshin Alipour , S.O. Reza Moheimani
IFAC-PapersOnLine 52 ( 15) 295 -300

1
2019
High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy

Mohammad Maroufi , Anthony G. Fowler , Ali Bazaei , S. O. Reza Moheimani
Review of Scientific Instruments 86 ( 2) 023705

24
2015
On the modeling of tilted fixed-guided flexible beams under tension

Ali Bazaei , Mohammad Maroufi , S. O. Reza Moheimani
Acta Mechanica 227 ( 2) 333 -352

3
2016
Design and control of a MEMS nanopositioner with bulk piezoresistive sensors

Mohammad Maroufi , Y. K. Yong , S. O. Reza Moheimani
2015 IEEE Conference on Control Applications (CCA) 1455 -1460

2015
Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner

Ali Bazaei , Anthony G. Fowler , Mohammad Maroufi , S. O. Reza Moheimani
international conference on control applications 1014 -1019

1
2015
An adjustable-stiffness MEMS force sensor: Design, characterization, and control

Mohammad Maroufi , Hamed Alemansour , M. Bulut Coskun , S. O. Reza Moheimani
Mechatronics 56 198 -210

27
2018
Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design.

Nastaran Nikooienejad , Mohammad Maroufi , S. O. Reza Moheimani
Review of Scientific Instruments 90 ( 7) 073702

6
2019