Kalman Filter Enabled High-Speed Control of a MEMS Nanopositioner

摘要: Abstract We demonstrate a novel tracking controller formulation based on linear time-varying Kalman filter to regulate amplitude and phase of reference signal independently. The method is applicable sinusoidal references such as spiral, cycloid Lissajous trajectories which are commonly used for imaging in high-speed Atomic Force Microscopy (AFM). A Microelectromechanical Systems (MEMS) nanopositioner, whose fundamental resonance frequency dampened with an additional damping feedback loop, employed. For scan range 2µm, we experimental sinusoids frequencies high 5kHz, well beyond the open-loop resonance, error only 4.6 nm.