Sequential Cycloid Scanning for Time-resolved Atomic Force Microscopy

摘要: We report sequential atomic force microscope (AFM) imaging with a cycloid scan pattern where one lateral axis of the nanopositioner follows sinusoid superimposed on slow triangular signal. Due to abrupt slope change in signal, large peaks appear tracking error. To smoothen sharp turning points and reduce error, an optimization technique is employed. achieve highperformance tracking, we utilized internal model controller which includes reference signals while additional models are also added deal system nonlinearities. The experiment conducted two degrees freedom microelectromechanical within area $5 \ \mu\mathrm{m}\times 10 \mu\mathrm{m}$ pitch size 44.2 nm as scanning time 80.6 msec. peak error x-axis negligible due optimal trajectory root mean square value obtained 4.9 4.4 for x- y-axis, respectively. A sequence contact mode constant height AFM images acquired at 12.4 fps.