Radio-frequency glow discharge spectrometry:. A critical review
作者： Michael R. Winchester , Richard Payling
DOI: 10.1016/J.SAB.2004.02.013
关键词: Plasma 、 Radio frequency glow discharge 、 Chemistry 、 Mass spectrometry 、 Analytical chemistry 、 Radio frequency 、 Atomic absorption spectroscopy 、 Engineering physics 、 Optical emission spectrometry 、 Glow discharge 、 Fundamental physics
摘要: … Radio-frequency plasma sheaths In both dc and rf glow discharges, sheaths form around the surfaces in contact with the plasma. The sheaths are characterized by the presence of …
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