Micro and nano fabricated phononic crystals: technology and applications

作者: Roy H. Olsson , Maryam Ziaei-Moayyed , Bongsang Kim , Charles Reinke , Mehmet F. Su

DOI: 10.1109/ULTSYM.2011.0241

关键词: MicrofabricationMicroelectromechanical systemsAcoustic metamaterialsNanotechnologyNano-Materials science

摘要:

参考文章(23)
Manzhu Ke, Zhengyou Liu, Chunyin Qiu, Wengang Wang, Jing Shi, Weijia Wen, Ping Sheng, Negative-refraction imaging with two-dimensional phononic crystals Physical Review B. ,vol. 72, pp. 064306- ,(2005) , 10.1103/PHYSREVB.72.064306
Charles M. Reinke, M. F. Su, R. H. Olsson, I. El-Kady, Realization of optimal bandgaps in solid-solid, solid-air, and hybrid solid-air-solid phononic crystal slabs Applied Physics Letters. ,vol. 98, pp. 061912- ,(2011) , 10.1063/1.3543848
Saeed Mohammadi, Ali Asghar Eftekhar, William D. Hunt, Ali Adibi, High-Q micromechanical resonators in a two-dimensional phononic crystal slab Applied Physics Letters. ,vol. 94, pp. 051906- ,(2009) , 10.1063/1.3078284
Y. M. Soliman, M. F. Su, Z. C. Leseman, C. M. Reinke, I. El-Kady, R. H. Olsson, Effects of release holes on microscale solid–solid phononic crystals Applied Physics Letters. ,vol. 97, pp. 081907- ,(2010) , 10.1063/1.3476354
Patrick E. Hopkins, Charles M. Reinke, Mehmet F. Su, Roy H. Olsson, Eric A. Shaner, Zayd C. Leseman, Justin R. Serrano, Leslie M. Phinney, Ihab El-Kady, Reduction in the Thermal Conductivity of Single Crystalline Silicon by Phononic Crystal Patterning Nano Letters. ,vol. 11, pp. 107- 112 ,(2011) , 10.1021/NL102918Q
M. F. Su, R. H. Olsson, Z. C. Leseman, I. El-Kady, Realization of a phononic crystal operating at gigahertz frequencies Applied Physics Letters. ,vol. 96, pp. 053111- ,(2010) , 10.1063/1.3280376
Tsung-Tsong Wu, Liang-Chen Wu, Zi-Gui Huang, Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers Journal of Applied Physics. ,vol. 97, pp. 094916- ,(2005) , 10.1063/1.1893209
Saeed Mohammadi, Ali Asghar Eftekhar, Abdelkrim Khelif, William D. Hunt, Ali Adibi, Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates Applied Physics Letters. ,vol. 92, pp. 221905- ,(2008) , 10.1063/1.2939097
Suxia Yang, J. H. Page, Zhengyou Liu, M. L. Cowan, C. T. Chan, Ping Sheng, Focusing of sound in a 3D phononic crystal. Physical Review Letters. ,vol. 93, pp. 024301- ,(2004) , 10.1103/PHYSREVLETT.93.024301
Y. M. Soliman, M. F. Su, Z. C. Leseman, C. M. Reinke, I. El-Kady, R. H. Olsson, Phononic crystals operating in the gigahertz range with extremely wide band gaps Applied Physics Letters. ,vol. 97, pp. 193502- ,(2010) , 10.1063/1.3504701