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作者: Roy H. Olsson , Maryam Ziaei-Moayyed , Bongsang Kim , Charles Reinke , Mehmet F. Su
DOI: 10.1109/ULTSYM.2011.0241
关键词: Microfabrication 、 Microelectromechanical systems 、 Acoustic metamaterials 、 Nanotechnology 、 Nano- 、 Materials science
摘要:
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