Integrated circuit probe parallelism establishing method and apparatus

摘要: A probe mount carries a with test points having ends in point plane. The is supported at three spaced apart locations by respective first, second and third supports, each adjacent to one of the points. These supports permit independent shifting along parallel lines. As these are shifted relative another, plane tilted until it containing surface an integrated circuit wafer be probed. positioned advanced toward probe. contact surface, tilted. Microprocessor controlled stepper motors may used tilt shift surface.