Design, fabrication, and characterization of metal micromachined rectangular waveguides at 3 THz
作者： C.D. Nordquist , M.C. Wanke , A.M. Rowen , C.L. Arrington , M. Lee
关键词: Resist 、 Integrated systems 、 Surface micromachining 、 Materials science 、 Terahertz radiation 、 Fabrication 、 Characterization (materials science) 、 Optoelectronics 、 Horn (acoustic) 、 Optics 、 Silicon
摘要: … Single-mode 75 µm x 37 µm rectangular waveguide … thick gold micromachining. THz transmission through these … In this work, we describe rectangular waveguide technology …
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