Steady-state, glow discharge plasma
作者： Chaoyu Liu , Peter P. Tsai , John R. Roth
DOI:
关键词: Neon lamp 、 Atomic physics 、 Helium 、 Enclosure 、 Noble gas 、 Electrode 、 Neon 、 Volume (thermodynamics) 、 Chemistry 、 Argon
摘要: A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential 1 KV at 100 KHz. The are located enclosure capable maintaining atmosphere other than atmospheric air electrode surfaces. Space occupied by noble gas such as helium, neon, argon, etc. or mixtures thereof.
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