Probing the lateral composition profile of self-assembled islands.

作者: U. Denker , M. Stoffel , O. G. Schmidt

DOI: 10.1103/PHYSREVLETT.90.196102

关键词: Strain energyOptoelectronicsSubstrate surfaceQuantum dotIsland growthNanotechnologySelf assembledEtching (microfabrication)Material systemMaterials scienceHeterojunction

摘要: We apply a selective etching procedure to probe the lateral composition profile of self-assembled SiGe pyramids on Si(001) substrate surface. find that consist highly Si intermixed corners, whereas edges, apex, and center remain Ge rich. Our results cannot be explained by existing growth models minimize strain energy. use model includes surface interdiffusion during island growth, underlining paramount importance processes formation quantum dot heterostructures in many different material systems.

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