Electron microscopy by specimen design: application to strain measurements

作者: Nikolay Cherkashin , Thibaud Denneulin , Martin J. Hÿtch

DOI: 10.1038/S41598-017-12695-8

关键词: DetectorTransmission electron microscopyDiffractionLens (optics)OpticsIon beamResolution (electron density)Moiré patternElectron microscopeMaterials science

摘要: A bewildering number of techniques have been developed for transmission electron microscopy (TEM), involving the use ever more complex combinations lens configurations, apertures and detector geometries. In parallel, developments in field ion beam instruments modernized sample preparation enabled various types materials. However, desired final specimen geometry is always almost same: a thin foil uniform thickness. Here we will show that judicious design can make all difference experiments be carried out on most basic microscope usual imaging modes. We propose two methods allow formation controlled moire patterns general monocrystalline structures cross-section at specific sites. image treatment algorithms using an absolute correction projection distortions TEM allows strain measurements mapping with nanometer resolution 10-4 precision. Imaging diffraction other fields may turn benefit from this technique perspective.

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