基板加熱スパッタによるSmFe12/α-Fe系ナノコンポジット薄膜の作製
作者： T. Nomura , H. Kato , M. Ishizone , H. Kubota , T. Miyazaki
关键词: Materials science 、 Nanocomposite 、 Nanotechnology 、 Film plane 、 Thin film 、 Substrate (electronics) 、 Sputter deposition 、 Volume fraction 、 Analytical chemistry 、 Phase (matter) 、 Sputtering
摘要: Highly aligned SmFe12/α-Fe nanocomposite thin films were fabricated by rf magnetron sputtering onto heated glass substrates. The volume fraction of the α-Fe phase (VFe) was adjusted systematically putting a different number Sm tips (5 × 5 mm2) on Fe target. Nearly single-phase SmFe12 ThMn12-type structure with (001) plane parallel to film synthesized at substrate temperature Ts 550°C using 28 tips. These exhibited good squareness in demagnetization curve. By reducing 12 and keeping 550°C, we VFe’s. Two series structures without Ti underlayers (50 nm) fabricated, capping layers deposited both series. In underlayers, textures confirmed X-ray diffraction peak (BH)max 20 MGOe obtained for VFe about 25%. coexistence (101) textured grains observed, while maximum 22 6%.
sci-hub.st 参考文章(8)
H. Sun, T. Tomida, S. Hirosawa, Magnetic properties and microstructure studies of Sm–Fe magnetic thin films Journal of Applied Physics. ,vol. 81, pp. 328- 334 ,(1997) , 10.1063/1.364114
T. Schrefl, R. Fischer, J. Fidler, H. Kronmüller, Two‐ and three‐dimensional calculation of remanence enhancement of rare‐earth based composite magnets (invited) Journal of Applied Physics. ,vol. 76, pp. 7053- 7058 ,(1994) , 10.1063/1.358026
K. Ohashi, T. Yokoyama, R. Osugi, Y. Tawara, The magnetic and structural properties of R-Ti-Fe ternary compounds IEEE Transactions on Magnetics. ,vol. 23, pp. 3101- 3103 ,(1987) , 10.1109/TMAG.1987.1065256
A. Navarathna, H. Hegde, R. Rani, S.U. Jen, F.J. Cadieu, Controlled synthesis of differently textured Sm(Fe, Ti)/sub 12/ sputtered films IEEE Transactions on Magnetics. ,vol. 28, pp. 2838- 2840 ,(1992) , 10.1109/20.179644
M. Shindo, M. Ishizone, H. Kato, T. Miyazaki, A. Sakuma, Exchange-spring behavior in sputter-deposited α-Fe/NdFeB multilayer magnets Journal of Magnetism and Magnetic Materials. ,vol. 161, pp. L1- L5 ,(1996) , 10.1016/S0304-8853(96)00458-1
E.F. Kneller, R. Hawig, The exchange-spring magnet: a new material principle for permanent magnets IEEE Transactions on Magnetics. ,vol. 27, pp. 3588- 3600 ,(1991) , 10.1109/20.102931
M. Shindo, M. Ishizone, A. Sakuma, H. Kato, T. Miyazaki, Magnetic properties of exchange-coupled α-Fe/Nd–Fe–B multilayer thin-film magnets Journal of Applied Physics. ,vol. 81, pp. 4444- 4446 ,(1997) , 10.1063/1.364970
Fujio IZUMI, The Rietveld Method Nihon Kessho Gakkaishi. ,vol. 34, pp. 76- 85 ,(1992) , 10.5940/JCRSJ.34.76