A compact MEMS-based wide-angle optical scanner
作者： B. Yang , L. Zhou , X. Zhang , S. Koppal , H. Xie
关键词: Actuator 、 Laser scanning 、 Lidar 、 Scanner 、 3d printed 、 Based wide 、 Optoelectronics 、 Microelectromechanical systems 、 Materials science 、 Optics 、 Dome (geology)
摘要: … used to boost the scanning angle of MEMS mirrors. The MEMS mirror working at resonance requires delicate control [2], while the submerged MEMS mirror in liquid utilizes the Snell’s …
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ufl.edu 参考文章(5)
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