作者: Xiaoyang Zhang , Sanjeev J. Koppal , Rui Zhang , Liang Zhou , Elizabeth Butler
DOI: 10.1364/OE.24.003479
关键词:
摘要: … devices in water, we were the first [5] to show that MEMS mirrors immersed in liquid could scan over a large range at moderate speed and could also have interesting control properties …