Large size MEMS scanning mirror with vertical comb drive for tunable optical filter
作者： Yingming Liu , Jing Xu , Shaolong Zhong , Yaming Wu
DOI: 10.1016/J.OPTLASENG.2012.07.019
关键词:
摘要: This paper presents the design, fabrication and characterization of a large size MEMS scanning mirror in application of tunable optical filter (TOF). In the design of scanning mirror, …
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sci-hub.se 参考文章(19)
J.H. Kim, H.K. Lee, B.I. Kim, J.W. Jeon, J.W. Yoon, E. Yoon, A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch international conference on micro electro mechanical systems. pp. 259- 262 ,(2003) , 10.1109/MEMSYS.2003.1189735
D.M. Maron, C. Dorrer, I. Kang, C.R. Doerr, M. Cappuzzo, L. Gomez, E. Chen, A. Wong-Foy, E. Laskowski, F. Klemens, C. Bolle, R. Cirelli, E. Ferry, T. Sorsch, J. Miner, E. Bower, M.E. Simon, F. Pardo, D. Lopez, Compact spectral pulse shaping using hybrid planar lightwave circuit and free-space optics with MEMS piston micromirrors and spectrogram feedback control lasers and electro-optics society meeting. ,vol. 2, pp. 585- 586 ,(2004) , 10.1109/LEOS.2004.1363374
L.O.S Ferreira, S Moehlecke, A silicon micromechanical galvanometric scanner Sensors and Actuators A-physical. ,vol. 73, pp. 252- 260 ,(1999) , 10.1016/S0924-4247(98)00288-X
Chang-Hyeon Ji, Moongoo Choi, Sang-Cheon Kim, See-Hyung Lee, Seong-Hyok Kim, Youngjoo Yee, Jong-Uk Bu, An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame Journal of Micromechanics and Microengineering. ,vol. 16, pp. 1033- 1039 ,(2006) , 10.1088/0960-1317/16/5/021
Robert G. Azevedo, Wayne Huang, Oliver M. O’Reilly, Albert P. Pisano, Dual-mode temperature compensation for a comb-driven MEMS resonant strain gauge Sensors and Actuators A-physical. ,vol. 144, pp. 374- 380 ,(2008) , 10.1016/J.SNA.2008.02.007
Jui-che Tsai, Li-Cheng Lu, Wei-Chi Hsu, Chia-Wei Sun, Ming C Wu, Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators Journal of Micromechanics and Microengineering. ,vol. 18, pp. 015015- ,(2008) , 10.1088/0960-1317/18/1/015015
Hongbin Yu, Haiqing Chen, Development of a novel micromirror based on surface micromaching technology Sensors and Actuators A-physical. ,vol. 125, pp. 458- 462 ,(2006) , 10.1016/J.SNA.2005.06.020
Sihua Li, Jing Xu, Shaolong Zhong, Yaming Wu, None, Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications Sensors and Actuators A-physical. ,vol. 171, pp. 274- 282 ,(2011) , 10.1016/J.SNA.2011.07.001
Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai, None, Design and fabrication of a MEMS scanning mirror with and without comb offset nano/micro engineered and molecular systems. pp. 186- 190 ,(2010) , 10.1109/NEMS.2010.5592180
Ming C. Wu, Olav Solgaard, Joseph E. Ford, Optical MEMS for Lightwave Communication Journal of Lightwave Technology. ,vol. 24, pp. 4433- 4454 ,(2006) , 10.1109/JLT.2006.886405