Dual-mode temperature compensation for a comb-driven MEMS resonant strain gauge
作者： Robert G. Azevedo , Wayne Huang , Oliver M. O’Reilly , Albert P. Pisano
DOI: 10.1016/J.SNA.2008.02.007
关键词:
摘要: Abstract A novel vibration mode pair is proposed for the dual-mode temperature compensation of MEMS-scale double-ended tuning fork (DETF) resonant strain gauges excited using comb drives. The does not require a redesign resonator, which was originally optimized maximum sensitivity. Instead, two different modes are chosen to take advantage both in-plane and levitation forces present in standard capacitive arrays. This approach similar techniques used quartz resonators, but differs that (1) one bending torsional (2) compensating lower frequency than main strain-sensing mode. choice pairs further advantageous because no changes required electrodes excite mode, axial sensitivity DETF compromised. By tracking shapes single resonator can be determine temperature. exhibits sensitivities 36 Hz/ μ ϵ − 7.1 Hz/ ° C 0.7 Hz/ 8.3 Hz/ experiments confirm feasibility these comb-driven resonators.
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