Ultrahigh-Dynamic-Range Resonant MEMS Load Cells for Micromechanical Test Frames
作者： Kivanc Azgin , Tayfun Akin , Lorenzo Valdevit
DOI: 10.1109/JMEMS.2012.2211576
关键词:
摘要: This paper presents a resonant double-ended tuning fork (DETF) force sensor with an experimentally demonstrated resolution of 7 nN and compressive load range 0.08 N, exceeding dynamic 140 dB (100 parts per billion). The resonator has scale factor 216 kHz/N, Q -factor 60 000 at 3-mtorr ambient pressure, zero-load frequency 47.6 kHz. is kept resonance via phase-locked loop composed discrete elements. implemented silicon-on-glass process 100-μm -thick ; silicon structural layer. the complete readout circuit are fully embedded in compact 65 mm × 52 printed board (PCB). out-of-plane parasitic modes DETF also investigated finite-element simulations laser Doppler vibrometry experiments, verified to be outside device working range. PCB mounted on microstage coupled off-the-shelf displacement actuator realize economical, versatile, robust micromechanical test frame unprecedented combination
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