Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators
作者： Jui-che Tsai , Li-Cheng Lu , Wei-Chi Hsu , Chia-Wei Sun , Ming C Wu
DOI: 10.1088/0960-1317/18/1/015015
关键词:
摘要: A driving scheme using a pair of differential voltages (Vx, Vy) over bias voltage is proposed to linearize the dc characteristic (angle versus voltage) two-axis MEMS scanner. The micromirror has gimbal-less structure and driven by vertical comb-drive actuators in conjunction with leverage mechanism. At an optimal 53 V, linear optical scan range ±3.2° achieved experimentally both x y directions ranging from −10 V + 10 V.
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