作者: Junhwan Choi , Munkyu Joo , Hyejeong Seong , Kwanyong Pak , Hongkeun Park
关键词: Chemical vapor deposition 、 Polymer 、 Gate dielectric 、 Dielectric strength 、 Polymer chemistry 、 Chemical engineering 、 Copolymer 、 Materials science 、 Dielectric 、 High-κ dielectric 、 Thin-film transistor
摘要: A series of high-k, ultrathin copolymer gate dielectrics were synthesized from 2-cyanoethyl acrylate (CEA) and di (ethylene glycol) divinyl ether (DEGDVE) monomers by a free radical …