Effect of laser power on orientation and microstructure of TiO2 films prepared by laser chemical vapor deposition method
作者： Dongyun Guo , Akihiko Ito , Takashi Goto , Rong Tu , Chuanbin Wang
DOI: 10.1016/J.MATLET.2012.11.121
关键词: Laser power scaling 、 Deposition temperature 、 Nanotechnology 、 Chemical vapor deposition 、 Materials science 、 Rutile 、 Microstructure 、 Analytical chemistry 、 Deposition rate 、 Grain size 、 Laser
摘要: … In the present study, the laser irradiation of the substrate and precursor gases enhanced the chemical reaction and ensured that it is diffusion limited with a high supply rate of precursor …
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