Determining the Young's modulus and creep effects in three different photo definable epoxies for MEMS applications
作者： Kristof Wouters , Robert Puers
DOI: 10.1016/J.SNA.2009.03.021
关键词: Composite material 、 Resist 、 Stress–strain curve 、 Machining 、 Creep 、 Young's modulus 、 Modulus 、 Tensile testing 、 Epoxy 、 Materials science
摘要: In this study, a fundamental measurement of the Young's modulus Epoclad and Epocore negative photo resist is performed, using miniature tensile test setup. The experiments were done on dog bone structures which are fabricated normal micro machining methods. addition, creep behavior maximum stress strain at point fracture resists recorded. two reveal mechanical very similar to well-reported SU-8. SU-8 also tested same tools for comparison.
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