An EpoClad/EpoCore-based platform for MOEMS fabrication
作者： Tiannan Guan , Frederik Ceyssens , Robert Puers
DOI: 10.1088/0960-1317/23/12/125005
关键词:
摘要: EpoClad and EpoCore are the photopatternable epoxies with slightly different refractive indices that were developed to create optical waveguides. In this paper, we present a simple, robust flexible fabrication platform for micro-opto-electro-mechanical systems applications based on these materials. used cladding core layers of integrated waveguides, respectively, as well surrounding mechanical framework includes built-in fiber clamping system allows both horizontal vertical fibers. The transmission properties various waveguide configurations studied. Then, thermal modulators investigated. A tunable in-plane hydrogel microlens setup is then shown further demonstrates concept proposed platform.
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