Development and fabrication of a novel photopatternable electric responsive Pluronic hydrogel for MEMS applications
作者： T. Guan , F. Godts , F. Ceyssens , E. Vanderleyden , K. Adesanya
DOI: 10.1016/J.SNA.2012.01.021
关键词: Nanotechnology 、 Swelling 、 Microelectromechanical systems 、 Voltage 、 Actuator 、 Microsystem 、 Electrode 、 Materials science 、 Fabrication 、 Microfluidics
摘要: Abstract In this paper, we present the controlled swelling of a novel active material for microsystems: photopatternable electric responsive Pluronic hydrogel. It is very promising as an actuator in biomedical and microfluidic applications. Upon application modest voltages over electrodes aqueous environment, it shows volume about 400% compared with its initial dry state. We synthesis material, development MEMS compatible fabrication process measurement results on fabricated test structures.
core.ac.uk
elsevier.com
sci-hub.se 参考文章(33)
Michael J. Bassetti, David J. Beebe, Demonstration of Hydrogel Volume Control Using Pulse Width Modulation Springer, Dordrecht. pp. 718- 720 ,(2002) , 10.1007/978-94-010-0504-3_39
F Masson, C Decker, S Andre, X Andrieu, UV-curable formulations for UV-transparent optical fiber coatings: I. Acrylic resins Progress in Organic Coatings. ,vol. 49, pp. 1- 12 ,(2004) , 10.1016/S0300-9440(03)00122-X
Hydrogel sensors and actuators Springer Berlin Heidelberg. ,(2010) , 10.1007/978-3-540-75645-3
Atsushi Suzuki, Toyoichi Tanaka, Phase transition in polymer gels induced by visible light Nature. ,vol. 346, pp. 345- 347 ,(1990) , 10.1038/346345A0
K. Sawahata, M. Hara, H. Yasunaga, Y. Osada, Electrically controlled drug delivery system using polyelectrolyte gels Journal of Controlled Release. ,vol. 14, pp. 253- 262 ,(1990) , 10.1016/0168-3659(90)90165-P
Guoping Chen, Yoshihiro Ito, Yukio Imanishi, Micropattern immobilization of a pH-sensitive polymer Macromolecules. ,vol. 30, pp. 7001- 7003 ,(1997) , 10.1021/MA9709112
Esmaiel Jabbari, Javad Tavakoli, Alireza S Sarvestani, Swelling characteristics of acrylic acid polyelectrolyte hydrogel in a dc electric field Smart Materials and Structures. ,vol. 16, pp. 1614- 1620 ,(2007) , 10.1088/0964-1726/16/5/015
Bo Wang, Xiao-Ding Xu, Zong-Chun Wang, Si-Xue Cheng, Xian-Zheng Zhang, Ren-Xi Zhuo, Synthesis and properties of pH and temperature sensitive P(NIPAAm-co-DMAEMA) hydrogels. Colloids and Surfaces B: Biointerfaces. ,vol. 64, pp. 34- 41 ,(2008) , 10.1016/J.COLSURFB.2008.01.001
Jing Shang, Zhengzhong Shao, Xin Chen, Chitosan-based electroactive hydrogel Polymer. ,vol. 49, pp. 5520- 5525 ,(2008) , 10.1016/J.POLYMER.2008.09.067
Yoshiharu Hirose, Giulio Giannetti, John Marquardt, Toyoichi Tanaka, Migration of Ions and pH Gradients in Gels under Stationary Electric Fields Journal of the Physical Society of Japan. ,vol. 61, pp. 4085- 4097 ,(1992) , 10.1143/JPSJ.61.4085