Epitaxial growth of In2Se3 on monolayer transition metal dichalcogenide single crystals for high performance photodetectors

作者: Pranab K Mohapatra , Kamalakannan Ranganathan , Lital Dezanashvili , Lothar Houben , Ariel Ismach

DOI: 10.1016/J.APMT.2020.100734

关键词: EpitaxyHigh-resolution transmission electron microscopyHeterojunctionOptoelectronicsMonolayerCrystalChemical vapor depositionSelected area diffractionvan der Waals forceMaterials science

摘要: … Symmetric source and drain contacts were patterned using standard electron beam lithography, while the heavily doped Si substrate underneath the SiO 2 layer, was used as the gate …

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