Method and apparatus for inspecting integrated circuit pattern
作者： Hiroyuki Shinada , Atsuko Takafuji , Yusuke Yajima , Takashi Hiroi , Mari Nozoe
DOI:
关键词: Structural engineering 、 Inspection method 、 Optics 、 Sample (graphics) 、 Signal 、 Integrated circuit 、 Cathode ray 、 Irradiation 、 Materials science 、 Charged particle
摘要: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected sample is made predetermined charged state, irradiated with image-forming high-density electron beam while scanning beam, secondary particles are detected at after period time from instance when irradiated, image formed on basis thus particle signal, by using image.
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