Substrate testing apparatus used in semiconductor device manufacture, detects reflection electron with discharge energy which is equivalent to incidence energy of primary beam radiated from substrate
作者： Yuichiro Yamazaki , Motosuke Miyoshi , Takamitsu Nagai , Ichirota Nagahama
DOI:
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摘要: A detector detects the reflection electron with discharge energy which is equivalent to incidence of primary beam radiated from substrate. An optical unit forms image as one-dimensional or two-dimensional test image, after projected secondary beam. Independent claims are also included for following: (1) substrate testing method; and (2) semiconductor device manufacturing method.
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