System and Method for Run-Time Hermeticity Detection of a Capped MEMS Device
作者： Benoit Dufort , Daniel Boyko , Matthew Aaron Hazel , James Wilson , Colm Prendergast
DOI:
关键词: Amplitude 、 Acoustics 、 Microelectromechanical systems 、 Acceleration 、 Electronic engineering 、 Error signal 、 Engineering 、 Signal 、 Accelerometer
摘要: Determining if a hermetically sealed MEMs device loses hermeticity during operation. In one embodiment, the is an accelerometer. A test signal having associated frequency above operational range for accelerometer provided to at input operation of sensing acceleration. The output filtered least producing signal. then compared predetermined threshold determine amplitude differs from threshold. If threshold, error produced indicating that has been lost.
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