Narrow band excimer or molecular fluorine laser with adjustable bandwidth

作者: Peter Heist , Jürgen Kleinschmidt

DOI:

关键词: LaserBandwidth (signal processing)OpticsActive laser mediumResonatorMaterials scienceLaser power scalingElectrodeRound-trip gainDielectric resonator antenna

摘要: A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by resonator for generating beam, discharge circuit including plurality of electrodes energizing the and line-narrowing unit within narrowing bandwidth system. The deformable reflector. technique adjusting surface contour desired may be selected manually using processor which automatically controls adjustment.

参考文章(41)
Michael R Smith, High power mirror ,(1970)
Richard L. Sandstrom, Spectral narrowing technique ,(1990)
Hermann Bucher, Tunable laser oscillator ,(1980)
Palash Parijat Das, Alexander I. Ershov, Very narrow band KrF laser ,(1997)
Uwe Stamm, Sergei V. Govorkov, Hybrid laser resonator with special line narrowing ,(1998)
Richard L. Sandstrom, Peter C. Newman, Wavelength system for an excimer laser ,(1999)
Masahiko Kowaka, Yasuo Itakura, Kaoru Saito, Koichi Kajiyama, Yasuhiro Nozue, Osamu Wakabayashi, Light source for reduced projection ,(1987)
Alexander I. Ershov, Very narrow band laser ,(1997)