F2-laser with line selection

摘要: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one the is selected by wavelength selection optics. The optics a first preferred embodiment include birefringent Brewster window enclosing gas volume discharge chamber. preferably comprises MgF2 located at end One line two when optical thickness in coordination with rotatably adjustable, orthogonal refractive indices window. transmissivity dependent on second are least partially within active volume. In this way, performed manner which optimizes combination efficiency, resonator size cost. unit includes prism having front surface oriented Brewster's angle back to receive reflect an ordinary refracted ray travelling right surface. also highly reflective coating serve as resonator. further adjustment component for adjusting orientation other housing, opposite outcoupling end.