Excimer laser inspection system
作者： J. Joseph Armstrong , Yung-ho Chuang , David Lee Brown , Bin-Ming Benjamin Tsai
DOI:
关键词:
摘要: A system and method for inspecting a specimen, such as semiconductor wafer, including illuminating at least portion of the specimen using an excimer source one relatively intense wavelength from source, detecting radiation received illuminated analyzing detected potential defects present in portion.
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