Method of substrate treatment, computer-readable recording medium, substrate treating apparatus and substrate treating system
作者： Kazuyoshi Yamazaki , Kouji Shimomura , Miki Aruga , Shintaro Aoyama
DOI:
关键词: Dielectric 、 Biomedical engineering 、 Nitrogen atom 、 Optoelectronics 、 Materials science 、 Substrate (printing)
摘要: A method of substrate treatment comprising, with the use a sheet-feed treating apparatus provided first position for introducing nitrogen atoms in highly dielectric film and second heat film, sequentially delivering multiple substrates to be treated one by positions thereby carry out atom introduction heating on treated, wherein after position, resultant is begun within 30 sec.
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