Spatial distributions of H, CN, and C2 in a diamond-growing oxyacetylene flame

摘要: Two-dimensional laser-induced fluorescence (2D-LIF) measurements are applied to the chemical vapor deposition (CVD) of diamond by an oxyacetylene flame visualize distributions atomic hydrogen, C2, and CN in gas phase during growth. Experiments carried out laminar flames reveal that hydrogen is ubiquitous at beyond front. Its presence extends well outside region, whereas C2 distribution limited front acetylene feather. found be present mostly outer edge flame, where ambient air interacts with gases. The layers obtained characterized optical as scanning electron microscopy (SEM) cathodoluminescence topography (CL). Clear relations observed between local variations growth rate layer H, boundary just above substrate. Further morphology nitrogen incorporation identified CL deposited well. These agree theoretical models describing importance mentioned species (flame) processes diamond. Three separate regions can discerned layer, predominantly governed source gases, atmosphere, interaction both, respectively.