An Investigation of the Plasma Composition in Plasma-enhanced Hot Filament Catalytic Chemical Vapor Deposition of Carbon Nanotubes
作者： M. Guláš , C. S. Cojocaru , F. Le Normand , S. Farhat
DOI: 10.1007/S11090-007-9111-1
关键词: Transmission electron microscopy 、 Hydrogen 、 Acetylene 、 Nanotube 、 Materials science 、 Carbon nanotube 、 Carbon nanofiber 、 Carbon nanotube supported catalyst 、 Analytical chemistry 、 Scanning electron microscope
摘要: A mixture of acetylene, hydrogen and ammonia (C2H2/H2/NH3) is used to produce carbon nanotubes (CNTs) by a plasma-enhanced catalytic chemical vapor deposition process either without (PE CCVD) or with hot filaments-assistance HF CCVD). mathematical model based on Chemkin™ computer package for analyzing specific conditions nanotube synthesis. Simulations are compared optical emission spectroscopy (OES) measurements. Morphological structural investigations the grown nanostructures also performed using scanning electron microscopy (SEM) transmission (TEM). It was shown that significant change in density morphology CNTs presence NH3 could be mainly explained gas phase formation CN HCN. Both species display high etching activity, whereas C, CH, CH2, CH2(S), C2 C2H expected most probable precursors.
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