The role of Plasma and Hot Filaments in enhanced-CVD processes of carbon deposition

作者: P. Veis , S. Farhat , J. Krištof , M. Guláš , M. Angus

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摘要: ) is used to produce carbon nanotubes. Morphological and structural investigations on the grown nanostructures are also performed using scanning electron microscopy (SEM) transmission (TEM). It was shown that significant change in density morphology of CNTs presence NH

参考文章(1)
M. Guláš, C. S. Cojocaru, F. Le Normand, S. Farhat, An Investigation of the Plasma Composition in Plasma-enhanced Hot Filament Catalytic Chemical Vapor Deposition of Carbon Nanotubes Plasma Chemistry and Plasma Processing. ,vol. 28, pp. 123- 146 ,(2008) , 10.1007/S11090-007-9111-1