Electron microscope backscattered electron detectors

作者: Vivian N. E. Robinson

DOI:

关键词: Electron beam-induced depositionEnvironmental scanning electron microscopeElectron microscopeConventional transmission electron microscopeOpticsScanning transmission electron microscopyPhysicsScanning electron microscopeElectronElectron tomography

摘要: An electron microscope backscattered detector comprising an arm of scintillation material with a hole through which the beam passes, being provided removable grounded liner to facilitate cleaning and prevent astigmatism problems due build up.

参考文章(3)
Volker Rindfleisch, Hans-Martin Thieringer, Reinhard Schliepe, Karl-Heinz Muller, Detector for a scanning transmission-type electron microscope ,(1976)
Tadao Watanabe, Electron scanning apparatus ,(1974)