Excitation of surface plasmons on titanium nitride films : determination of the dielectric function

作者: D. Steinmüller-Nethl , R. Kovacs , E. Gornik , P. Rödhammer

DOI: 10.1016/0040-6090(94)90273-9

关键词: Surface plasmonOpticsEllipsometryWork (thermodynamics)Condensed matter physicsExcitationDispersion relationReflection (mathematics)TinTitanium nitrideMaterials science

摘要: Abstract For the first time it is possible to observe excitation of surface plasmons (SP) on thin titanium nitride (TiN) films. From angle- and wavelength-dependent reflection measurements dielectric function TiN, thus optical constants, were calculated. Therefore, main aim this work was determination real imaginary parts e(ω) dispersion relation SP TiN. This method an alternative standard technique ellipsometry for complex function.

参考文章(19)
Petr Beckmann, Andre Spizzichino, The scattering of electromagnetic waves from rough surfaces ,(1963)
Erwin Kretschmann, Die Bestimmung optischer Konstanten von Metallen durch Anregung von Oberflächenplasmaschwingungen European Physical Journal A. ,vol. 241, pp. 313- 324 ,(1971) , 10.1007/BF01395428
I. Pockrand, H. Raether, Surface plasma oscillations at sinusoidal silver surfaces Applied Optics. ,vol. 16, pp. 1784- 1786 ,(1977) , 10.1364/AO.16.001784
J.C. François, G. Chassaing, P. Gravier, R. Pierrisnard, A.M. Bonnot, Reflectivity of ScNx thin films: Comparison with TiNx, TiNxCy and ZrNx coatings and application to the photothermal conversion of solar energy Thin Solid Films. ,vol. 127, pp. 205- 214 ,(1985) , 10.1016/0040-6090(85)90191-9
K. Berthold, R. A. Höpfel, E. Gornik, Surface plasmon polariton enhanced photoconductivity of tunnel junctions in the visible Applied Physics Letters. ,vol. 46, pp. 626- 628 ,(1985) , 10.1063/1.95507
F. Toigo, A. Marvin, V. Celli, N. R. Hill, Optical properties of rough surfaces: General theory and the small roughness limit Physical Review B. ,vol. 15, pp. 5618- 5626 ,(1977) , 10.1103/PHYSREVB.15.5618
W.D. Münz, D. Hoffmann, K. Hartig, A high rate sputtering process for the formation of hard friction-reducing TiN coatings on tools Thin Solid Films. ,vol. 96, pp. 79- 86 ,(1982) , 10.1016/0040-6090(82)90215-2
Björn Karlsson, Jan-Erik Sundgren, Bengt-Olof Johansson, Optical constants and spectral selectivity of titanium carbonitrides Thin Solid Films. ,vol. 87, pp. 181- 187 ,(1982) , 10.1016/0040-6090(82)90273-5