Conduction in amorphous thin films of silicon nitride under non-uniform electric fields

摘要: It is observed that amorphous thin films of silicon nitride with dissimilar (aluminium and silicon) electrodes exhibit conduction properties a consistent dependence on the polarity applied electric field film thickness. In particular, for given average (voltage/thickness) it found that: (i) larger (aluminium) negative than positive polarity; (ii) this effect more pronounced 500 A 1000 films; (iii) both polarities, films. This surprising in view evidence paper these by bulk-controlled process. model based unequal trapping near two electrodes, which creates variation position into film, qualitative agreement all experimental results.